logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10234261 B1

PDFFull Text
Expired
Date of Patent:
Mar. 19, 2019

Filed:

Oct. 29, 2013

Fast and continuous eddy-current metrology of a conductive film

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Edward W. Budiarto, Fremont, CA (US);

Dmitry A. Dzilno, Sunnyvale, CA (US);

Todd J. Egan, Fremont, CA (US);

Jeffrey C. Hudgens, San Francisco, CA (US);

Nir Merry, Mountain View, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Bryan D Ripa

Assistant Examiner:

Ho-Sung Chung

Int. Cl.
CPC ...
C25D 7/12 (2006.01); G01B 7/06 (2006.01); C25D 17/12 (2006.01); C25D 21/12 (2006.01); G01N 27/20 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
G01B 7/105 (2013.01); C25D 17/001 (2013.01); C25D 21/12 (2013.01); G01N 27/20 (2013.01); C25D 7/123 (2013.01); C25D 17/12 (2013.01);
Abstract

A measurement tool includes a rotation stage supporting an workpiece support, a thickness sensor overlying a workpiece support surface; a translation actuator coupled to the thickness sensor for translation of the thickness sensor relative to the workpiece support surface; and a computer coupled to control the rotation actuator and the translation actuator, and coupled to receive an output of the thickness sensor.

Find Patent Forward Citations

Budiarto, Edward. (2019). Fast and continuous eddy-current metrology of a conductive film (U.S. Patent No. 10234261). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10234261

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…