The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2019
Filed:
Jun. 30, 2017
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Benjamin D. Briggs, Waterford, NY (US);
Lawrence A. Clevenger, LaGrangeville, NY (US);
Bartlet H. Deprospo, Goshen, NY (US);
Huai Huang, Clifton Park, NY (US);
Christopher J. Penny, Saratoga Springs, NY (US);
Michael Rizzolo, Albany, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 28/40 (2013.01); H01L 23/5223 (2013.01);
Abstract
Capacitors and methods of forming the same include forming a gap in a dielectric layer underneath one or more conducting lines, such that the one or more conducting lines are suspended over the gap. A capacitor stack is deposited in the gap and on the conducting lines. Respective contacts are deposited on the conducting lines and on the capacitor stack.