The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Oct. 12, 2017
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/10 (2006.01); G01J 1/58 (2006.01); G01J 1/42 (2006.01); H01L 21/67 (2006.01); G01J 1/02 (2006.01); G01J 1/04 (2006.01); G01J 5/04 (2006.01); G01J 5/08 (2006.01); G01K 11/20 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01J 1/429 (2013.01); G01J 1/0204 (2013.01); G01J 1/0271 (2013.01); G01J 1/0407 (2013.01); G01J 1/58 (2013.01); G01J 5/04 (2013.01); G01J 5/0818 (2013.01); G01J 5/10 (2013.01); G01K 11/20 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 22/10 (2013.01);
Abstract
A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The measurement wafer device further includes a detector assembly. The detector assembly includes one or more light sensors. The detector assembly is further configured to perform a direct or indirect measurement of the intensity of ultraviolet light incident on a surface of the wafer assembly.