The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2019

Filed:

Jun. 27, 2016
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Ordos, Inner Mongolia, CN;

Inventors:

Chaobo Zhang, Beijing, CN;

Liangliang Liu, Beijing, CN;

Hongwei Tian, Beijing, CN;

Nini Bai, Beijing, CN;

Shuai Han, Beijing, CN;

Feng Kang, Beijing, CN;

Liang Tang, Beijing, CN;

Chuoluopeng, Beijing, CN;

Tiangui Min, Beijing, CN;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/38 (2012.01); G03F 1/52 (2012.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 1/52 (2013.01); G03F 1/38 (2013.01); G03F 7/70283 (2013.01); G03F 7/70308 (2013.01); G03F 7/70325 (2013.01);
Abstract

The present invention provides a mask plate, relating to a field of exposure technology, which can solve the problem of an existing mask plate that a resolution is limited by an effect of diffraction. The mask plate of the invention includes: a pattern structure, including a light blocking region and a light transmitting region; and a total reflection structure provided at an light-exiting side of the pattern structure, the total reflection structure including a high refraction layer and a first low refraction layer sequentially provided in a direction away from the pattern structure and contacting each other, wherein a refractive index of the high refraction layer is greater than a refractive index of the first low refraction layer.


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