The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 12, 2019

Filed:

Apr. 07, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Xusheng Wu, Ballston Lake, NY (US);

Jin Ping Liu, Ballston Lake, NY (US);

Min-hwa Chi, San Jose, CA (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/165 (2006.01); H01L 29/78 (2006.01); H01L 29/737 (2006.01); H01L 29/08 (2006.01); H01L 29/66 (2006.01); H01L 21/265 (2006.01); H01L 29/732 (2006.01);
U.S. Cl.
CPC ...
H01L 29/165 (2013.01); H01L 21/26506 (2013.01); H01L 29/0821 (2013.01); H01L 29/0847 (2013.01); H01L 29/6625 (2013.01); H01L 29/66242 (2013.01); H01L 29/66272 (2013.01); H01L 29/66636 (2013.01); H01L 29/732 (2013.01); H01L 29/737 (2013.01); H01L 29/7371 (2013.01); H01L 29/7848 (2013.01);
Abstract

Transistor structures and methods of fabricating transistor structures are provided. The methods include: fabricating a transistor structure at least partially within a substrate, the fabricating including: providing a cavity within the substrate; and forming a first portion and a second portion of the transistor structure at least partially within the cavity, the first portion being disposed at least partially between the substrate and the second portion, where the first portion inhibits diffusion of material from the second portion into the substrate. In one embodiment, the transistor structure is a field-effect transistor structure, and the first portion and the second portion include one of a source region or a drain region of the field-effect transistor structure. In another embodiment, the transistor structure is a bipolar junction transistor structure.


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