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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10204819 B1

PDFFull Text
Date of Patent:
Feb. 12, 2019

Filed:

Oct. 20, 2017

Vapor phase growth apparatus and ring-shaped holder having a curved mounting surface with convex and concave regions

Applicant:

Nuflare Technology, Inc., Kanagawa, JP;

Inventors:

Yasushi Iyechika, Matsudo, JP;

Masayuki Tsukui, Yokohama, JP;

Yoshitaka Ishikawa, Yokohama, JP;

Assignee:

NuFlare Technology, Inc., Kanagawa, JP;

Attorney:

Rankin, Hill & Clark LLP

Primary Examiner:

Kenneth A Bratland, Jr

Int. Cl.
CPC ...
C30B 25/12 (2006.01); H01L 21/687 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); C30B 25/10 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); C30B 29/68 (2006.01); H01L 33/00 (2010.01); H01L 33/06 (2010.01); H01L 33/12 (2010.01); H01L 33/32 (2010.01);
U.S. Cl.
CPC ...
H01L 21/68735 (2013.01); C30B 25/10 (2013.01); C30B 25/12 (2013.01); C30B 25/18 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); C30B 29/68 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02433 (2013.01); H01L 21/02458 (2013.01); H01L 21/02658 (2013.01); H01L 21/67103 (2013.01); H01L 21/68764 (2013.01); H01L 33/007 (2013.01); H01L 33/06 (2013.01); H01L 33/12 (2013.01); H01L 33/32 (2013.01);
Abstract

A vapor phase growth apparatus according to an embodiment includes a reaction chamber, a ring-shaped holder provided in the reaction chamber, the ring-shaped holder configured to hold a substrate, the ring-shaped holder including an outer portion having ring-shape and an inner portion having ring-shape, the inner portion including a substrate mounting surface positioned below an upper surface of the outer portion, the substrate mounting surface being a curved surface, the curved surface having convex regions and concave regions repeated in a circumferential direction, the curved surface having six-fold rotational symmetry, and a heater provided below the ring-shaped holder.

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