The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 29, 2019

Filed:

May. 01, 2015
Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Hirokazu Nishimaki, Toyama, JP;

Keisuke Hashimoto, Toyama, JP;

Takafumi Endo, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 8/02 (2006.01); G03F 7/11 (2006.01); C09D 161/16 (2006.01); G03F 7/16 (2006.01); H01L 21/308 (2006.01); G03F 7/09 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 8/02 (2013.01); C09D 161/16 (2013.01); G03F 7/094 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); H01L 21/0271 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01);
Abstract

The present invention provides a novel resist underlayer film-forming composition capable of forming a resist underlayer film that has etching resistance and excellent embeddability in a surface having concave portions and/or convex portions. A resist underlayer film-forming composition comprising a polymer having a structural unit represented by formula (1) or formula (2): (wherein X is an arylene group, n is 1 or 2, and R, R, R, and Rare each independently a hydrogen atom, a hydroxy group, a Calkyl group, or a phenyl group), and a solvent.


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