The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Nov. 05, 2015
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Thomas Fischer, Villach, AT;
Gerald Lackner, Arnoldstein, AT;
Walter Horst Leitgeb, Wernberg, AT;
Michael Lecher, Villach, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01B 11/27 (2006.01); H01L 21/68 (2006.01); H01L 21/78 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); G01B 11/272 (2013.01); H01L 21/681 (2013.01); H01L 21/78 (2013.01); H01L 22/20 (2013.01); H01L 21/67092 (2013.01);
Abstract
A method and an apparatus for use in processing a wafer are disclosed. In an embodiment the method includes providing a wafer on a receptacle, shining a light at an edge of the wafer and based on light that passed the edge of the wafer, processing the wafer on the receptacle.