The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2019
Filed:
Nov. 18, 2016
Tokyo Electron Limited, Tokyo, JP;
Yuichi Takenaga, Iwate, JP;
Hiroyuki Matsuura, Iwate, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A heat treatment system includes a heating unit that heats an inside of a processing chamber that accommodates a plurality of workpieces; a pressure adjusting unit that adjusts a pressure in the processing chamber; a heat treatment condition storing unit that stores a heat treatment condition according to a heat treatment content; a heat treatment change model storing unit that stores a heat treatment change model that represents a relationship between a change of the temperature and the pressure in the processing chamber and a change of a heat treatment result; a heat treatment performing unit that performs a heat treatment according to the heat treatment condition stored in the heat treatment condition storing unit; and a calculating unit that calculates a temperature and a pressure from which a target heat treatment result is derived.