The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10180630 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 15, 2019

Filed:

Jun. 30, 2017
Applicant:

Asml Netherlands B.v., Veldhoven, NL;

Inventors:

Teunis Willem Tukker, Eindhoven, NL;

Nitesh Pandey, Eindhoven, NL;

Coen Adrianus Verschuren, Eindhoven, NL;

Assignee:

ASML Netherlands B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); F21V 9/30 (2018.01); F21V 14/08 (2006.01); F21Y 115/10 (2016.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); F21V 9/30 (2018.02); F21V 14/08 (2013.01); G03F 7/7005 (2013.01); G03F 7/70575 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); F21Y 2115/10 (2016.08);
Abstract

An illumination system has a microLED array. The microLED arrayis imaged or placed very close to a phosphor coated glass discwhich upconverts the light from the microLED array into a narrow band emission. The plate has at least two different photoluminescent materials arranged to be illuminated by the microLED array and to thereby emit output light. The different photoluminescent materials have different emission spectral properties of the output light, e.g. different center wavelength and optionally different bandwidth. Illumination of different photoluminescent materials by the illumination sources is selectable, by selective activation of the microLEDs or by movement of the photoluminescent materials relative to the illumination sources, to provide different illumination of the different photoluminescent materials. This provides tunable spectral properties of the output light. Selectively configurable filtersare arranged to filter the output light in accordance with the selected illumination of the different photoluminescent materials.


Find Patent Forward Citations

Tukker, Teunis. (2019). Illumination system for a lithographic or inspection apparatus (U.S. Patent No. 10180630). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10180630

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