The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2019
Filed:
Feb. 27, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Yutaka Fujino, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); H01L 21/52 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67144 (2013.01); C23C 16/4412 (2013.01); C23C 16/45546 (2013.01); C23C 16/54 (2013.01); H01L 21/52 (2013.01); H01L 21/6719 (2013.01); H01L 21/6773 (2013.01); H01L 21/67161 (2013.01); H01L 21/67167 (2013.01); H01L 21/67196 (2013.01); H01L 21/67742 (2013.01); H01L 21/6838 (2013.01); H01L 21/68764 (2013.01);
Abstract
A substrate processing system for performing a process with respect to a plurality of substrates includes an annular process chamber configured to accommodate the plurality of substrates and to perform a predetermined process on the plurality of substrates, a cassette mounting part configured to mount a cassette which accommodates the plurality of substrates, and a substrate transfer mechanism configured to transfer the plurality of substrates between the annular process chamber and the cassette mounting part. The plurality of substrates is concentrically disposed within the annular process chamber in a plane view.