The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 01, 2019

Filed:

Mar. 16, 2016
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Yutaka Kasai, Tokyo, JP;

Fujio Onishi, Tokyo, JP;

Osamu Tasaki, Tokyo, JP;

Hidetsugu Tanoue, Tokyo, JP;

Kazuhiro Tanaka, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/44 (2006.01); G01T 1/28 (2006.01); G01N 23/20 (2018.01); G01N 23/203 (2006.01); G01N 23/22 (2018.01); G01N 23/225 (2018.01); G01J 1/42 (2006.01); G01N 21/66 (2006.01); G01N 21/956 (2006.01); G01T 1/164 (2006.01); G01T 1/20 (2006.01);
U.S. Cl.
CPC ...
G01J 1/44 (2013.01); G01J 1/42 (2013.01); G01N 21/66 (2013.01); G01N 21/956 (2013.01); G01N 23/203 (2013.01); G01N 23/22 (2013.01); G01N 23/225 (2013.01); G01T 1/1647 (2013.01); G01T 1/20 (2013.01);
Abstract

A signal detected by a photomultiplier tube is pre-amplified and converted into a digital signal. A time average value of signal components, each of which has a voltage lower than a predetermined base threshold value, is calculated as a base voltage. A signal that has been subjected to base correction processing is subjected to threshold value processing and to base correction processing in a non-incident state in which light is not incident on the photomultiplier tube. An output signal thereof is subjected to dark current calculation processing; and a light emission signal amount is calculated by subtracting, from the signal component of the detection light obtained by the threshold value processing, a time average value of the signal components of the dark current. As the result, discriminating the dark current pulse from floor noises enhances the accuracy of the base voltage, and thus the accuracy of light detection.


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