The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Jul. 15, 2014
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chien-Nan Tu, Kaohsiung, TW;

Yu-Lung Yeh, Kaohsiung, TW;

Hsing-Chih Lin, Tainan, TW;

Chien-Chang Huang, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/76 (2006.01); H01L 31/18 (2006.01); H01L 31/101 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1864 (2013.01); H01L 27/1469 (2013.01); H01L 27/14625 (2013.01); H01L 27/14634 (2013.01); H01L 27/14685 (2013.01); H01L 27/14698 (2013.01); H01L 31/101 (2013.01); H01L 31/1804 (2013.01); H01L 31/1892 (2013.01); H01L 27/14621 (2013.01); Y02E 10/547 (2013.01); Y02P 70/521 (2015.11);
Abstract

A semiconductor device includes a carrier wafer, a device layer, a first semiconductor layer and a second semiconductor layer. The device layer is disposed on the carrier wafer. The first semiconductor layer is disposed on the device layer, and has a first side face and a second side face opposite to the first side face, in which the first side face is adjacent to the device layer. The second semiconductor layer is disposed on the first semiconductor layer, and has a third side face and a fourth side face opposite to the third side face, in which the fourth side face of the second semiconductor layer is adjacent to the second side face of the first semiconductor layer, and the second semiconductor layer is implanted and annealed.


Find Patent Forward Citations

Loading…