The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 25, 2018

Filed:

Mar. 03, 2017
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Makoto Orikasa, Tokyo, JP;

Hideyuki Seike, Tokyo, JP;

Yuhei Horikawa, Tokyo, JP;

Hisayuki Abe, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 24/81 (2013.01); H01L 24/95 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 2224/81002 (2013.01); H01L 2224/81014 (2013.01); H01L 2224/81022 (2013.01); H01L 2224/81035 (2013.01); H01L 2224/81047 (2013.01); H01L 2224/81048 (2013.01); H01L 2224/81065 (2013.01); H01L 2224/81143 (2013.01); H01L 2224/81815 (2013.01); H01L 2224/95146 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06565 (2013.01);
Abstract

A method for producing a semiconductor package is a method for producing a semiconductor package in which a plurality of semiconductor chips, each of which includes a substrate, conductive portions formed on the substrate, and microbumps formed on the conductive portions, are laminated, which includes a heating process of causing a reducing gas to flow in an inert atmosphere into a space where the semiconductor chips are arranged and heated at or higher than a temperature of a melting point of the microbump, and in the heating process, a pressure application member is mounted on the microbump.


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