The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
May. 03, 2016
Applicants:
Boe Technology Group Co., Ltd., Beijing, CN;
Hefei Boe Optoelectronics Technology Co., Ltd., Hefei, Anhui, CN;
Inventors:
Assignees:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Hefei, Anhui, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70683 (2013.01); G01B 11/14 (2013.01); G03F 7/70633 (2013.01);
Abstract
Embodiments of the present disclosure disclose an overlay key including at least two overlay marks each having a first sub-mark and a second sub-mark centro-symmetrical to each other, the first sub-mark and the second sub-mark each including two bar patterns that are perpendicular to each other and have a common end. At least two of the overlay marks are located in different layers. Also disclosed is a method of forming the overlay key and a method of measuring overlay accuracy.