The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Nov. 04, 2015
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Remi Riviere, Dresden, DE;
Arthur Hotzel, Dresden, DE;
Assignee:
GLOBALFOUNDRIES, Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 29/46 (2006.01); G01N 29/24 (2006.01); G03F 1/62 (2012.01); G03F 1/84 (2012.01); G01N 29/11 (2006.01); G01N 29/34 (2006.01);
U.S. Cl.
CPC ...
G01N 29/2418 (2013.01); G01N 29/11 (2013.01); G01N 29/348 (2013.01); G01N 29/46 (2013.01); G03F 1/62 (2013.01); G03F 1/84 (2013.01); G01N 2291/015 (2013.01); G01N 2291/2697 (2013.01);
Abstract
A method and apparatus for detecting changes in the vibrational mode spectra and/or elasticity of a pellicle without reliance upon visual inspection are provided. Embodiments include providing a pellicle, a lower surface of the pellicle attached to a photomask; directing light from a light source onto an upper surface of the pellicle at an angle to the upper surface; causing a deflection of the pellicle concurrently with the light being directed onto the pellicle; detecting light reflected off of the deflected pellicle; and characterizing a vibrational mode of the pellicle based on the detection.