The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2018
Filed:
Mar. 31, 2017
Ebara Corporation, Tokyo, JP;
Tomohiro Tanaka, Tokyo, JP;
Kenichiro Saito, Tokyo, JP;
Koichi Takeda, Tokyo, JP;
Masumi Nishijima, Tokyo, JP;
Ryuichi Kosuge, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate processing apparatus includes transport mechanismstoa sensorfor detecting whether a wafer W is held by the transport mechanismstoa sensor controllerfor controlling the sensora position information acquiring partfor acquiring position information of the substrate W in the transport passage, a detection result acquiring partfor acquiring a detection result from the sensorand a determination processorfor determining whether the detection result of the sensor and the position information are consistent with each other. When it is determined that the detection result of the sensoris inconsistent with the position information, the sensor controllermakes the sensorretry to detect whether the substrate W is held.