The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 18, 2018

Filed:

Aug. 31, 2017
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Sheng-Kang Yu, Hsinchu, TW;

Yu-Fu Lin, Hsinchu, TW;

Chia-Chen Chen, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 15/10 (2006.01); G02B 26/08 (2006.01); G01B 11/27 (2006.01); G03F 7/20 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01); H01L 21/68 (2006.01); G01B 11/16 (2006.01); G01B 11/26 (2006.01); G01D 5/26 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70358 (2013.01); G01B 11/16 (2013.01); G01B 11/26 (2013.01); G01B 11/27 (2013.01); G01D 5/26 (2013.01); G03F 7/001 (2013.01); G03F 7/2037 (2013.01); H01L 21/0331 (2013.01); H01L 21/3086 (2013.01); H01L 21/682 (2013.01);
Abstract

Positioning devices and positioning methods are provided. The positioning device includes a laser source and an optical assembly. The optical assembly is configured to direct a laser beam projected from the laser source toward a floor and a ceiling of a semiconductor fabrication facility to generate a first laser line on the floor and a second laser line on the ceiling. The first laser line and the second laser line are parallel to and aligned with each other when viewed in a direction perpendicular to the floor and the ceiling. Accordingly, the first laser line and the second laser line can be used to align a semiconductor tool and an overhead hoist transport system in the semiconductor fabrication facility.


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