The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Aug. 29, 2012
Noboru Higashi, Neyagawa, JP;
Satoru Hiraki, Neyagawa, JP;
Hiromi Kiyose, Neyagawa, JP;
Hideaki Sato, Koshi, JP;
Hiroshi Komiya, Koshi, JP;
Noboru Higashi, Neyagawa, JP;
Satoru Hiraki, Neyagawa, JP;
Hiromi Kiyose, Neyagawa, JP;
Hideaki Sato, Koshi, JP;
Hiroshi Komiya, Koshi, JP;
Kurashiki Boseki Kabushiki Kaisha, Kurashiki-shi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.