The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
May. 23, 2017
Screen Holdings Co., Ltd., Kyoto, JP;
Yuta Sasaki, Kyoto, JP;
Yosuke Hanawa, Kyoto, JP;
Soichi Nadahara, Kyoto, JP;
Dai Ueda, Kyoto, JP;
Hiroaki Kitagawa, Kyoto, JP;
Katsuya Okumura, Tokyo, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.