The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Apr. 22, 2016
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Masakazu Sugaya, Tokyo, JP;
Yusuke Moriwaki, Tokyo, JP;
Koichi Terada, Tokyo, JP;
Nobuo Shibata, Tokyo, JP;
Hironori Ogawa, Tokyo, JP;
Hiroyuki Kitsunai, Tokyo, JP;
Toshihiko Shimizu, Tokyo, JP;
Shuichi Nakagawa, Tokyo, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with light weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism. The sample lifting and lowering device includes first and second lifting and lowering mechanisms that lift and lower a sample stage to which the sample is fixed, first and second driving devices that drive the first and second lifting and lowering mechanisms to be lifted and lowered individually and a controller that synchronizes lifting/lowering operations of the first and second lifting and lowering mechanisms by the first and second driving devices by first and second control signals, in which the first lifting and lowering mechanism includes a first deceleration mechanism generating a first drive output obtained by decelerating a first drive input given from the first driving device in a direction different from a direction of the input, the second lifting and lowering mechanism includes a second deceleration mechanism generating a second drive output obtained by decelerating a second drive input given from the second driving device in a direction different from a direction of the input, and directions of the first and second drive inputs are different from each other as well as are not on the same straight line.