The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Jul. 13, 2017
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Kerstin Hild, Schwaebisch Gmuend, DE;

Franz-Josef Stickel, Aalen-Unterrombach, DE;

Robert Fichtl, Aalen, DE;

Joachim Hartjes, Aalen, DE;

Assignee:

CARL ZEISS SMT GMBH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G21K 1/06 (2006.01); G02B 27/00 (2006.01); G02B 26/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70266 (2013.01); G02B 26/06 (2013.01); G02B 27/0068 (2013.01); G03F 7/70316 (2013.01); G03F 7/70958 (2013.01); G21K 1/062 (2013.01); G21K 2201/067 (2013.01);
Abstract

A method for producing an optical element includes: providing a substrate (), applying a layer system (), wherein an optically effective surface () is formed and wherein the layer system has a layer () that is thermally deformable for manipulating the geometric shape of the optically effective surface, and applying a temperature field to the optical element while at least regionally heating the thermally deformable layer to above a specified operating temperature of the optical system. The thermally deformable layer is configured such that a deformation that is induced when the temperature field is applied is at least partially maintained after the optical element has cooled. Also disclosed is an optical element () that has an optically effective surface (), a substrate (), and a layer system () that has a reflection layer system (), which includes a shape-memory alloy.


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