The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
May. 21, 2014
Ebara Corporation, Tokyo, JP;
Kohtaro Kawamura, Tokyo, JP;
Toyoji Shinohara, Tokyo, JP;
Tetsuro Sugiura, Tokyo, JP;
Hideo Arai, Tokyo, JP;
Takashi Kyotani, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Keiichi Ishikawa, Tokyo, JP;
Seiji Kashiwagi, Tokyo, JP;
Yasuhiko Suzuki, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.