The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Apr. 29, 2016
Applicants:
Tokyo Electron Limited, Minato-ku, Tokyo, JP;
Fujimi Incorporated, Kiyosu-shi, Aichi, JP;
Inventors:
Assignees:
TOKYO ELECTRON LIMITED, Tokyo, JP;
FUJIMI INCORPORATED, Kiyosu-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/505 (2006.01); C23C 4/12 (2016.01); C01F 17/00 (2006.01); C23C 4/04 (2006.01); C23C 24/04 (2006.01); C23C 4/129 (2016.01); C23C 4/126 (2016.01); C23C 4/134 (2016.01); C04B 35/50 (2006.01); C04B 35/553 (2006.01);
U.S. Cl.
CPC ...
C04B 35/505 (2013.01); C01F 17/0062 (2013.01); C04B 35/50 (2013.01); C04B 35/553 (2013.01); C23C 4/04 (2013.01); C23C 4/126 (2016.01); C23C 4/129 (2016.01); C23C 4/134 (2016.01); C23C 24/04 (2013.01); C01P 2002/72 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/445 (2013.01);
Abstract
This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.