The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Sep. 06, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Michael Patra, Oberkochen, DE;
Markus Deguenther, Aalen, DE;
Paul Buettner, Aalen, DE;
Willi Heintel, Aalen, DE;
Henner Baitinger, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03F 7/20 (2006.01); G02B 5/08 (2006.01); G02B 5/09 (2006.01); G02B 26/08 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70091 (2013.01); G02B 5/0891 (2013.01); G02B 5/09 (2013.01); G02B 26/0833 (2013.01); G02B 27/0068 (2013.01); G03F 7/70116 (2013.01);
Abstract
An optical component for a projection exposure apparatus includes a multiplicity of variably positionable beam-guiding elements which serve as pupil facets. The optical component can be arranged in the beam path of the projection optical unit.