The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2018

Filed:

Oct. 02, 2015
Applicant:

Seagate Technology Llc, Cupertino, CA (US);

Inventors:

Lin Zhou, Eagan, MN (US);

Huiwen Liu, Eden Prairie, MN (US);

Dale Egbert, Deephaven, MN (US);

Jonathan A. Nelson, Maple Grove, MN (US);

Jianxin Zhu, Eagan, MN (US);

Assignee:

SEAGATE TECHNOLOGY LLC, Cupertino, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 40/00 (2010.01); B82Y 35/00 (2011.01); G01Q 30/06 (2010.01);
U.S. Cl.
CPC ...
G01Q 40/00 (2013.01); B82Y 35/00 (2013.01); G01Q 30/06 (2013.01);
Abstract

Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.


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