The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Feb. 14, 2017
Asm Ip Holding B.v., Almere, NL;
Han Wang, Leuven, BE;
Qi Xie, Leuven, BE;
Delphine Longrie, Ghent, BE;
Jan Willem Maes, Wilrijk, BE;
David de Roest, Kessel-Lo, BE;
Julian Hsieh, Zhubei, TW;
Chiyu Zhu, Helsinki, FI;
Timo Asikainen, Helsinki, FI;
Krzysztof Kachel, Leuven, BE;
Harald Profijt, Leuven, BE;
ASM IP HOLDING B.V., Almere, NL;
Abstract
Methods are provided for selectively depositing Al and N containing material on a first conductive surface of a substrate relative to a second, dielectric surface of the same substrate. In some aspects, methods of forming an Al and N containing protective layer or etch stop layer for use in integrated circuit fabrication are provided.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile