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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10121659 B1

PDFFull Text
Date of Patent:
Nov. 06, 2018

Filed:

Sep. 27, 2017

Pattern forming method and heating apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Makoto Muramatsu, Koshi, JP;

Takahiro Kitano, Koshi, JP;

Tadatoshi Tomita, Koshi, JP;

Keiji Tanouchi, Nirasaki, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Posz Law Group, PLC

Primary Examiner:

Moin Rahman

Int. Cl.
CPC ...
H01L 21/027 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0271 (2013.01); H01L 21/02118 (2013.01); H01L 21/02337 (2013.01); H01L 21/31138 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H01L 21/68742 (2013.01);
Abstract

The present invention, when forming a pattern on a substrate, forms a film of a block copolymer containing at least two polymers on the substrate, heats the film of the block copolymer under a solvent vapor atmosphere to subject the block copolymer to phase separation, and removes one of the polymers in the film of the phase-separated block copolymer, thereby accelerating fluidization of the polymers of the block copolymer to enable acceleration of the phase separation.

Find Patent Forward Citations

Muramatsu, Makoto. (2018). Pattern forming method and heating apparatus (U.S. Patent No. 10121659). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10121659

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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