The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Mar. 03, 2016
Applicant:
Carl Zeiss Microscopy Gmbh, Jena, DE;
Inventors:
Assignee:
Carl Zeiss Microscopy GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/02 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/026 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/006 (2013.01); H01J 2237/0044 (2013.01); H01J 2237/0047 (2013.01); H01J 2237/2801 (2013.01);
Abstract
Methods are provided for operating a particle-optical device, wherein electrical charging of a sample to be examined is reduced. The particle-optical device includes a vacuum chamber for receiving a sample, a particle source for generating a primary particle beam directed to the sample, a scan generator for directed guidance of the primary particle beam over the sample surface, and at least one detector for detecting interaction products created during the interaction between the primary particle beam and the sample.