The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Jan. 29, 2015
Ebara Corporation, Tokyo, JP;
Jumpei Fujikata, Tokyo, JP;
Yoshio Minami, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A substrate holder includes: inner contacts () to be brought into contact with a periphery of a substrate (W) for passing an electric current to the substrate; outer contacts () each having elasticity, the outer contacts () having contact surfaces (), respectively, to be brought into contact with a feeding terminal () coupled to a power source (), the outer contacts () being coupled to the inner contacts (), respectively; and a conductive block () arranged in back of the contact surfaces () and located away from the outer contacts (). The outer contacts () are deformable until the outer contacts () are brought into contact with the conductive block () when the contact surfaces () are pressed against the feeding terminal ().