The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Apr. 29, 2016
Applicants:
Tokyo Electron Limited, Minato-ku, Tokyo, JP;
Fujimi Incorporated, Kiyosu-shi, Aichi, JP;
Inventors:
Assignees:
FUJIMI INCORPORATED, Kiyosu-Shi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/505 (2006.01); C23C 4/12 (2016.01); C23C 4/11 (2016.01); C23C 4/04 (2006.01); C23C 4/134 (2016.01);
U.S. Cl.
CPC ...
C23C 4/11 (2016.01); C23C 4/04 (2013.01); C23C 4/134 (2016.01);
Abstract
This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE—O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element.