Insulated gate bipolar transistor and manufacturing method therefor

Abstract

An insulated gate bipolar transistor () is provided. A substrate () of the insulated gate bipolar transistor () is of an N type. A P-type region () is disposed on a back of the N-type substrate. A back metal structure () is disposed on a back of the P-type region (). A terminal protection ring is disposed in a terminal structure. A polysilicon gate () is disposed on a front surface of the substrate () in an active region. Sidewalls () are disposed at two sides of the polysilicon gate () on the substrate (). An interlayer medium () covered with the polysilicon gate () and the sidewalls () is disposed on the substrate (). The interlayer medium () is covered with a metal lead wire layer (). An N-type carrier enhancement region () is disposed in the substrate () in the active region. A P-type body region () is disposed in the carrier enhancement region (). An N-type heavily doped region () is disposed in the P-type body region (). A P-type heavily doped region () is disposed in the N-type heavily doped region (). An inward recessed shallow pit () with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (). By disposing the carrier enhancement region (), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit () can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.