The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Mar. 20, 2014
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Isao Nagaoki, Tokyo, JP;
Toshiyuki Oyagi, Tokyo, JP;
Hiroaki Matsumoto, Tokyo, JP;
Kiyotaka Nakano, Tokyo, JP;
Takeshi Sato, Tokyo, JP;
Yasuhira Nagakubo, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An electron microscope includes a secondary electron detector () which detects an electron generated when a sample () is illuminated with an electron beam from an electron gun (), a monitor () which displays a secondary electron image of the sample based on an output of the detector, a gas inlet device () which emits gas to the sample, and a gas control device () which controls a gas emitting amount of the gas inlet device so that a degree of vacuum in an intermediate chamber () in which the secondary electron detector is installed may be kept at less than a set value P1 during gas emission performed by the gas inlet device. Accordingly, a microscopic image of the sample in a gas atmosphere with use of the detector requiring application of voltage is obtained.