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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10067423 B1

PDFFull Text
Date of Patent:
Sep. 04, 2018

Filed:

Feb. 25, 2015

Additive and resist underlayer film-forming composition containing the same

Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Yuto Hashimoto, Toyama, JP;

Yasushi Sakaida, Toyama, JP;

Kenji Takase, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:

NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/11 (2006.01); C08F 212/14 (2006.01); G03F 7/40 (2006.01); C08F 220/38 (2006.01); C08F 220/28 (2006.01); C08F 220/22 (2006.01); C09D 7/12 (2006.01); C09D 167/02 (2006.01); G03F 7/039 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01); G03F 7/09 (2006.01); C09D 7/65 (2018.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08F 212/14 (2013.01); C08F 220/22 (2013.01); C08F 220/28 (2013.01); C08F 220/38 (2013.01); C09D 7/125 (2013.01); C09D 7/65 (2018.01); C09D 167/02 (2013.01); G03F 7/039 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2006 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01); G03F 7/40 (2013.01); C08F 2220/282 (2013.01); C08F 2220/382 (2013.01);
Abstract

An additive for a resist underlayer film-forming composition containing a copolymer having structural units of Formulae (1) to (4), and a resist underlayer film-forming composition containing the additive: (where each Ris independently a hydrogen atom or methyl group, Ar is arylene group, Pr is a protecting group or a hydrogen atom, X is a direct bond or a —C(═O)O—R— group, Rconstituting the —C(═O)O—R— group is a Calkylene group, the alkylene group is bonded to a sulfur atom, Ris a hydrogen atom, methyl group, methoxy group, or halogeno group, Ris a Calkyl group in which at least one hydrogen atom is substituted with a fluoro group, and Z is an organic group having 4 to 7-membered ring lactone skeleton, adamantane skeleton, or norbornane skeleton).

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