The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 28, 2018

Filed:

Jan. 04, 2016
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Sai-Hooi Yeong, Zhubei, TW;

Sheng-Chen Wang, Hsinchu, TW;

Tsung-Yao Wen, Hsinchu, TW;

Yen-Ming Chen, Chu-Pei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 29/417 (2006.01); H01L 21/265 (2006.01); H01L 21/223 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/2236 (2013.01); H01L 21/26513 (2013.01); H01L 21/823412 (2013.01); H01L 21/823425 (2013.01); H01L 21/823431 (2013.01); H01L 29/41775 (2013.01);
Abstract

A semiconductor device and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a fin extending along a first direction over a substrate and a gate structure extending in a second direction overlying the fin. The gate structure includes a gate dielectric layer overlying the fin, a gate electrode overlying the gate dielectric layer, and a first insulating gate sidewall on a first lateral surface of the gate electrode extending along the second direction. A source/drain region is formed in the fin in a region adjacent the gate structure. A portion of the source/drain region extends under the insulating gate sidewall for a substantially constant distance along the first direction.


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