The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Mar. 07, 2016
Applicant:
Canon Anelva Corporation, Kawasaki-shi, Kanagawa-ken, JP;
Inventors:
Assignee:
CANON ANELVA CORPORATION, Kawasaki-Shi, Kanagawa-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/302 (2006.01); H01J 37/305 (2006.01); G05B 15/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/302 (2013.01); G05B 15/02 (2013.01); H01J 37/3053 (2013.01); H01J 2237/0044 (2013.01); H01J 2237/043 (2013.01); H01J 2237/334 (2013.01);
Abstract
A computer-readable recording medium encoded with a computer program for executing an ion etching method of etching a substrate arranged on a substrate holder using an ion beam etching apparatus. The computer program includes a decremental control program having a command according to which the first step is executed; and an incremental control program having a command according to which the second step is executed.