The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Aug. 12, 2016
Applicant:
Tiptek, Llc, West Chester, PA (US);
Inventors:
Joseph W. Lyding, Champaign, IL (US);
Gregory S. Girolami, Urbana, IL (US);
Scott P. Lockledge, West Chester, PA (US);
Jinju Lee, Champaign, IL (US);
Assignee:
Tiptek, LLC, West Chester, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 70/16 (2010.01); G01Q 70/10 (2010.01); G01Q 60/00 (2010.01); G01Q 60/16 (2010.01);
U.S. Cl.
CPC ...
G01Q 70/10 (2013.01); G01Q 60/00 (2013.01); G01Q 60/16 (2013.01); G01Q 70/16 (2013.01);
Abstract
Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.