The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 28, 2018

Filed:

Dec. 27, 2013
Applicant:

Corner Star Limited, Kowloon, HK;

Inventors:

Roberto Scala, Novara, IT;

Luigi Bonanno, Novara, IT;

Stephan Haringer, Novara, IT;

Armando Giannattasio, Novara, IT;

Valentino Moser, Novara, IT;

Jesse Samsonov Appel, O'Fallon, MO (US);

Martin Jeffrey Binns, St. Charles, MO (US);

Assignee:

Corner Star Limited, Kowloon, HK;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03B 15/04 (2006.01); C30B 15/04 (2006.01); H01L 31/0236 (2006.01); H01L 31/028 (2006.01); H01L 31/036 (2006.01); C30B 15/20 (2006.01); C30B 29/06 (2006.01); H01L 31/0288 (2006.01);
U.S. Cl.
CPC ...
C30B 15/04 (2013.01); C30B 15/20 (2013.01); C30B 29/06 (2013.01); H01L 31/028 (2013.01); H01L 31/0288 (2013.01); H01L 31/02363 (2013.01); H01L 31/036 (2013.01);
Abstract

A method of growing a monocrystalline silicon ingot is described. The method includes the steps of providing a monocrystalline ingot growing apparatus including a chamber having an internal pressure, and a crucible disposed within the chamber, preparing a silicon melt in the crucible, introducing an inert gas into the chamber from a gas inlet above the silicon melt, wherein the inert gas flows over the surface of the silicon melt and has a flow rate, introducing a volatile dopant including indium into the silicon melt, growing an indium-doped monocrystalline silicon ingot, and controlling the indium dopant concentration in the ingot by adjusting the ratio of the inert gas flow rate and the internal pressure of the chamber.


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