The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Jul. 14, 2016
Nomura Micro Science Co., Ltd., Atsugi-shi, JP;
Acm Research (Shanghai), Inc., Shanghai, CN;
Takayuki Jizaimaru, Atsugi-shi, JP;
David H. Wang, Shanghai, CN;
NOMURA MICRO SCIENCE CO., LTD., Atsugi-shi, JP;
ACM RESEARCH (SHANGHAI), INC., Shanghai, CN;
Abstract
A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of the first tank by ultrapure water to remove fine particles derived from ammonia generated in the first tank.