The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Feb. 10, 2016
Applied Materials Israel Ltd., Rehovot, IL;
Michael R. Rice, Pleasanton, CA (US);
Paul Reuter, Austin, TX (US);
William (Ty) Weaver, Austin, TX (US);
Travis Morey, Austin, TX (US);
Natan Schlimoff, Rehovot, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Israel Avneri, Ramat-Gan, IL;
Yoram Uziel, Misgav, IL;
Erez Admoni, Petach-Tikva, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.