The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Feb. 26, 2016
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Kuo-Ming Wu, Zhubei, TW;

Yung-Lung Lin, Taichung, TW;

Zhi-Yang Wang, Taichung, TW;

Sheng-Chau Chen, Tainan, TW;

Cheng-Hsien Chou, Tainan, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2006.01); H01L 25/00 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 25/0657 (2013.01); H01L 24/02 (2013.01); H01L 25/50 (2013.01);
Abstract

A method is provided. The method includes providing a first wafer having a plurality of first dummy pads exposed along a first surface of the first wafer. The first dummy pads contact a first metallization layer of the first water. The method also includes providing a second wafer having a plurality of second dummy pads exposed along a first surface of the second wafer. The second dummy pads contact a second metallization layer of the second wafer. The method also includes bonding the first wafer to the second wafer in a manner that the first surface of the first wafer contacts the first surface of the second wafer and the plurality of first dummy pads are interleaved with the plurality of second dummy pads but do not contact the plurality of second dummy pads.


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