The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Oct. 17, 2016
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventor:

Richard Kenneth Oxland, Brussels, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 27/092 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01); H01L 29/20 (2006.01); H01L 29/10 (2006.01); H01L 21/8258 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823885 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02546 (2013.01); H01L 21/02603 (2013.01); H01L 21/02636 (2013.01); H01L 21/8258 (2013.01); H01L 21/823807 (2013.01); H01L 21/823828 (2013.01); H01L 21/823871 (2013.01); H01L 21/823878 (2013.01); H01L 27/0688 (2013.01); H01L 27/092 (2013.01); H01L 29/0649 (2013.01); H01L 29/0676 (2013.01); H01L 29/1037 (2013.01); H01L 29/16 (2013.01); H01L 29/20 (2013.01); H01L 29/42392 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01); H01L 29/78618 (2013.01); H01L 29/78642 (2013.01); H01L 29/78681 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01);
Abstract

A method for forming stacked, complementary transistors is disclosed. Selective deposition techniques are used to form a column having a lower portion that includes one type of semiconductor (e.g. germanium) and an upper portion of another type of semiconductor (e.g. indium arsenide. The lower portion of the column provides a channel region for a transistor of one type, while the upper column provides a channel region for a transistor of another type. This provides a complementary pair that occupies a minimum of integrated circuit surface area. The complementary transistors can be utilized in a variety of circuit configurations. Described are complementary transistors where the lower transistor is p-type and the upper transistor is n-type.


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