Method of manufacturing selective nanostructures into finfet process flow

Abstract

A method for integrating nanostructures in finFET processing and a related device are provided. Embodiments include forming fins in a Si substrate in first and second device regions; forming STI regions in spaces between fins; forming a first hardmask over the fins and STI regions; removing a portion of the first hardmask over the first device region to expose upper surfaces of the fins and STI regions in the first device region; recessing an upper portion of the fins; forming first devices over the recessed fins; forming a second hardmask over the fins and STI regions; removing a portion of the second hardmask over the second device region to expose upper surfaces of the fins and STI regions; recessing an upper portion of the fins; and forming second devices, different from the first devices, over the recessed fins, wherein the first and/or second devices include nanowire or nanosheet devices.