The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2018
Filed:
Aug. 03, 2017
Applied Materials Israel Ltd., Rehovot, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Ofer Adan, Rehovot, IL;
Israel Avneri, Ramat-Gan, IL;
Yoram Uziel, Yodfat, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Niranjan Ramchandra Khasgiwale, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
A method and a system for moving a substrate, the system includes a chamber, a chuck, a movement system that is positioned outside the chamber, a controller, an intermediate element, at least one sealing element that is configured to form a dynamic seal between the intermediate element and the chamber housing. The movement system is configured to repeat, for each region of the substrate out of a plurality of regions of the substrate, the steps of: rotating the chuck to position a given portion of the region of the substrate within a field of view that is related to an opening of the chamber housing; and moving the chuck relation to the opening to position additional portions of the region of the substrate within the field of view that is related to the opening.