The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Aug. 19, 2015
Applicant:

Ev Group E. Thallner Gmbh, St. Florian am Inn, AT;

Inventor:

Andreas Fehkuhrer, Senftenbach, AT;

Assignee:

EV GROUP E. THALLNER GMBH, St. Florian am Inn, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/762 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); H01L 21/67109 (2013.01); H01L 21/67309 (2013.01); H01L 21/6838 (2013.01); H01L 21/68735 (2013.01); H01L 21/68771 (2013.01); H01L 21/76254 (2013.01);
Abstract

A substrate stack holder, a container comprising a plurality of substrate stack holders, and a method for parting a substrate stack. The substrate stack holder includes (a) a holding and separating device for (i) holding a substrate stack during a parting process in which the substrate stack is split into a first substrate stack part and a second substrate stack part, said substrate stack comprised of a first substrate, a second substrate, and a connecting region therebetween, and (ii) separating the first substrate stack part from the second substrate stack part after the parting process; and (b) a fixing device for receiving and fixing the separated first and second substrate stack parts.


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