The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2018
Filed:
Sep. 08, 2016
Applicants:
International Business Machines Corporation, Armonk, NY (US);
Stmicroelectronics, Inc., Coppell, TX (US);
Inventors:
Lawrence A. Clevenger, Rhinebeck, NY (US);
Carl J. Radens, LaGrangeville, NY (US);
Yiheng Xu, Hopewell Junction, NY (US);
John H. Zhang, Altamont, NY (US);
Assignees:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
STMICROELECTRONICS, INC., Coppell, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 27/146 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); H01L 29/24 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78693 (2013.01); H01L 21/823437 (2013.01); H01L 27/14614 (2013.01); H01L 29/247 (2013.01); H01L 29/4908 (2013.01); H01L 29/66969 (2013.01); H01L 29/78603 (2013.01); H01L 29/78618 (2013.01); H01L 29/78696 (2013.01);
Abstract
Processes and overturned thin film device structures generally include a metal gate having a concave shape defined by three faces. The processes generally include forming the overturned thin film device structures such that the channel self-aligns to the metal gate and the contacts can be self-aligned to the sacrificial material.