The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2018
Filed:
Oct. 24, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Jan Horn, Munich, DE;
Markus Holz, Aalen, DE;
Joerg Specht, Koenigsbronn, DE;
Johannes Eisenmenger, Ulm, DE;
Stefan Krone, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/42 (2006.01); G02B 7/182 (2006.01); G02B 26/08 (2006.01); G03F 7/20 (2006.01); G02B 17/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/1827 (2013.01); G02B 17/008 (2013.01); G02B 26/0841 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/7085 (2013.01); G03F 7/70116 (2013.01);
Abstract
An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.