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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10014145 B1

PDFFull Text
Date of Patent:
Jul. 03, 2018

Filed:

May. 15, 2017

Vacuum exhaust method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Tomohiro Saito, Yamanashi, JP;

Tadashi Mitsunaga, Yamanashi, JP;

Kouji Maeda, Yamanashi, JP;

Tetsuya Miyashita, Yamanashi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:
Primary Examiner:

Joseph L Williams

Assistant Examiner:

Jose M Diaz

Int. Cl.
CPC ...
H01J 11/52 (2012.01); H01J 41/16 (2006.01); H01J 21/18 (2006.01); H01J 11/46 (2012.01); H01J 41/12 (2006.01); H01J 21/02 (2006.01); H01J 11/20 (2012.01);
U.S. Cl.
CPC ...
H01J 11/52 (2013.01); H01J 11/46 (2013.01); H01J 21/18 (2013.01); H01J 41/16 (2013.01); H01J 11/20 (2013.01); H01J 21/02 (2013.01); H01J 41/12 (2013.01);
Abstract

A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

Find Patent Forward Citations

Saito, Tomohiro. (2018). Vacuum exhaust method (U.S. Patent No. 10014145). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10014145

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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