The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Apr. 25, 2016
Applicants:
Global Unichip Corporation, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventor:
Chang-Ming Liu, Hsinchu County, TW;
Assignees:
GLOBAL UNICHIP CORPORATION, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 1/073 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07371 (2013.01); G01R 31/2887 (2013.01); G01R 31/2889 (2013.01);
Abstract
A probe card and a testing method are disclosed herein. The probe card includes a plurality of probe sets arranged as a testing unit. The testing unit is configured to test a plurality of dies in a test region on a wafer, and to move m unit along a first direction and n unit along a second direction when the test complete so as to test the next test region, in which m and n are integers.