The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2018
Filed:
Sep. 26, 2016
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventors:
Charles M. Watkins, Eagle, ID (US);
William M. Hiatt, Eagle, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/382 (2014.01); B23K 26/03 (2006.01); B23K 26/362 (2014.01); H01L 21/768 (2006.01); H05K 3/00 (2006.01); H01L 21/48 (2006.01); B23K 26/38 (2014.01); B23K 26/40 (2014.01); B23K 26/361 (2014.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
B23K 26/382 (2015.10); B23K 26/03 (2013.01); B23K 26/0342 (2015.10); B23K 26/361 (2015.10); B23K 26/362 (2013.01); B23K 26/38 (2013.01); B23K 26/40 (2013.01); H01L 21/486 (2013.01); H01L 21/76898 (2013.01); H05K 3/0026 (2013.01); B23K 2201/40 (2013.01); B23K 2203/50 (2015.10); B23K 2203/56 (2015.10); H05K 2203/163 (2013.01); Y10T 29/49165 (2015.01);
Abstract
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece.